H
1
O:Oxide
N:Nitride
M:Metal
P:Phosphide/Asenide
S:Sulphide/Selenide/Telluride
C:Carbide
F:Fluoride
D:Dopant
O Oxide of this element has been deposited by the ALD community
O Recipe for this material is available from CNT staff or customer base
|
Acknowledgements
Gordon, Roy (2008). Atomic Layer Deposition (ALD): An Enable for Nanoscience and Nanotechnology. PowerPoint lecture presented at Harvard University, Cambridge, MA.
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