ALD: Which ALD System is Right for You?

  Savannah ALD System
Savannah®
Fiji ALD System
Fiji®
Phoenix ALD System
Phoenix®
Primary application R&D, small production R&D Mid scale production
Thermal Deposition Standard Standard Standard
Plasma Enhanced Deposition Optional Standard n/a
Small Batch Thermal Deposition Optional n/a Standard
Large Batch Thermal Deposition n/a n/a Standard
Cluster integration n/a Optional n/a
Automation n/a Semi-auto  optional Semi-auto optional
SEMI S2 Optional n/a Optional
 

Common features across systems

Whether your needs are low cost starter thermal tools, plasma enhanced systems with many integrated options and features, or a production system used 24x7, the common features are; simple user interface, quality built CE compliant platforms, Class 100 clean room compliant and all with a roadmap to meet the future ALD needs of tomorrow. We pride ourselves on being on the leading edge of ALD research. Our scientists and support personnel are all seasoned veterans of ALD.