Veeco Cambridge Nanotech provides optimal ALD solutions toward all solid-state 3D Li-ion batteries: fully optimized Lithium oxide thin films with low contamination, tunability of the composition for ternary and quaternary lithiated films, in-situ diagnostic for rapid process optimization and film characterization.
By implementing lithium-based ALD films in nanostructured 3D lithium-ion batteries, significant gains in power density, cycling performances during charge/discharge, and safety have been recently reported.
Using Veeco CNT ALD platforms, electrochemically active materials with high specific capacity such as LiCoO2, LiMn2O4 ternaries or lithium transition metal phosphate quarternaries (e.g., LiFePO4) have been successfully deposited on high aspect ratio 3D nanostructures, leading to fast ion transport and increased power density.
Solid state electrolytes, e.g., lithium phosphate, lithium tantalate  or LiPON  have been deposited both in Savannah® and Fiji® platforms to achieve tunable high ionic conductivity .
Very thin passivation layers such as Al2O3 (<1nm) have also been shown to significantly improve capacity retention of LIBs during electrochemical cycling by inhibiting the dissolution of the transition metal while enabling the diffusion of the lithium ions through the passivation layers. Lately Xiao and al. have optimized the performance layer of LiNi0.5Mn1.5O4 cathode materials using an electrochemically active FePO4 coating.
Conformal LiFePO4 cathode film deposited on carbon nanotube exhibit excellent discharge capacity and rate capability 
Deposition of Li5.1TaO2 solid electrolyte in high aspect ratio AAO with Li+ ion conductivity of 2E-8S/cm 
In-situ XPS demonstration carbon-free Li2O ALD with LiOtBu / H2O in Fiji®
LiPON solid electrolyte deposited by ALD. Ionic conductivity is tuned by %N content in film