Veeco/CNT offers a full suite of ALD systems for research and production applications. The affordable and reliable Savannah is a research workhorse. Fiji offers advanced experimentation capabilities such as plasma-enhanced ALD. Phoenix systems offer production ALD capacity.
Veeco/CNT is the leading ALD supplier to academic and industrial institutions worldwide, with hundreds of systems shipped for research and development. Our Savannah ALD system has been used to produce more than a thousand of peer-reviewed academic papers.
Kazyak, E. et al., Chem Mater 29, 3785–3792 (2017)
Xiao, B. et al., Angew. Chem. Int. Ed. 56, 4991–4995 (2017)
Xiao, B. et al., Nano Energy 34, 120–130 (2017)
Keller, B. D. et al., Chem Mater 29, 2024–2032 (2017)
Sowa, M. J. et al., Journal Of Vacuum Science & Technology A-Vacuum Surfaces And Films 35, 01B143 (2016)
At Veeco/CNT our customers’ feedback is important to us. The following quotes are typical of some of the responses we get from the tool owners in response to our direct support line at [ALDsupport AT ultratech DOT com].
June 29, 2016
“We have been working with the Savannah and Fiji ALD systems for over eight years and have found them to be excellent research tools. Our decision to move forward with our most recent purchase and to establish a collaborative relationship with Ultratech-CNT was based on our confidence in the performance of these products and in the consistency of support we have always received from the Ultratech-CNT staff over the years”
Prof. Miin-Jang Chen
Nanoelectronic and Nanophotonic Materials Laboratory (NNML)
National Taiwan University
June 24, 2015
"Ultratech-CNT's ALD system has provided a significant boost to our research productivity, enabling us to make rapid advances in the field of surface and interfacial modification of energy conversion devices, including batteries, solar cells, and catalysts. The versatility of the ALD system to address the varied needs of our research program, coupled with the depth of knowledge of their science and engineering team, has enabled us to move very quickly towards producing high-impact research. We are happy to be part of this significant milestone in receiving the 400th system, and we look forward to developing a strong relationship with Ultratech-CNT."
Prof. Neil Dasgupta
Department of Mechanical Engineering
University of Michigan
August 11, 2015
"The performance and flexibility of our Ultratech Fiji systems have driven our group's nano research since 2011. The role played by these systems has been critical in many of the advances made in Nanostructures for Electrical Energy Storage (NEES)-- our DOE, Energy Frontier Research Center.”
Prof. Gary Rubloff
Energy Frontier Research Center (EFRC)
University of Maryland