Veeco-CNT offers a full suite of ALD systems for research and production applications. The affordable and reliable Savannah is a research workhorse. Fiji offers advanced experimentation capabilities such as plasma-enhanced ALD. Phoenix systems offer production ALD capacity.
Veeco-CNT is the leading ALD supplier to academic institutions and industrial customers worldwide, with more than 530 ALD systems shipped for R&D and production. Our Savannah thermal and Fiji Plasma ALD systems are the ALD platforms of choice for R&D and have been cited in more than 2,000 peer-reviewed academic papers. They define the standards of ALD excellence for R&D.
Our fully automated industrial solutions for high-volume manufacturing (HVM) ALD combine lowest cost-of-ownership, superior throughput, and the highest standards of quality. HVM platforms are tailored to meet specific customer needs in terms of ALD process performance, wafer handling and throughput as well thermal management.
When you choose our equipment, you are backed by Veeco-CNT's passionate team of world-leading ALD researchers, users and proponents. Our skilled ALD scientists will bring the breadth and depth of experience to solve your toughest thin film challenges.
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At Veeco-CNT our customers’ feedback is important to us. The following quotes are typical of some of the responses we get from the tool owners in response to our direct support line at [ALDsupport AT veeco DOT com].
June 29, 2016
“We have been working with the Savannah and Fiji ALD systems for over eight years and have found them to be excellent research tools. Our decision to move forward with our most recent purchase and to establish a collaborative relationship with Veeco-CNT was based on our confidence in the performance of these products and in the consistency of support we have always received from the Veeco-CNT staff over the years”
Prof. Miin-Jang Chen
Nanoelectronic and Nanophotonic Materials Laboratory (NNML)
National Taiwan University
June 24, 2015
"Veeco-CNT's ALD system has provided a significant boost to our research productivity, enabling us to make rapid advances in the field of surface and interfacial modification of energy conversion devices, including batteries, solar cells, and catalysts. The versatility of the ALD system to address the varied needs of our research program, coupled with the depth of knowledge of their science and engineering team, has enabled us to move very quickly towards producing high-impact research. We are happy to be part of this significant milestone in receiving the 400th system, and we look forward to developing a strong relationship with Veeco-CNT."
Prof. Neil Dasgupta
Department of Mechanical Engineering
University of Michigan
August 11, 2015
"The performance and flexibility of our Veeco-CNT Fiji systems have driven our group's nano research since 2011. The role played by these systems has been critical in many of the advances made in Nanostructures for Electrical Energy Storage (NEES)-- our DOE, Energy Frontier Research Center.”
Prof. Gary Rubloff
Energy Frontier Research Center (EFRC)
University of Maryland