ALD Excellence for your R&D and Production Needs

Veeco is the leading ALD supplier to academic institutions and industrial customers worldwide, with over 530 ALD systems shipped for R&D and production.

Our Savannah® Thermal and Fiji® Plasma systems are the ALD platforms of choice for R&D and have been cited in more than 2,000 peer-reviewed academic papers. Our fully automated industrial solutions for high-volume manufacturing (HVM) ALD combine lowest cost-of-ownership, superior throughput, and the highest standards of quality. The new Firebird™ HVM and proven Phoenix® platform is tailored to meet specific customer needs in terms of ALD process performance, wafer handling and throughput as well as flexible thermal management.

When you choose our equipment, you are backed by a passionate team of world-leading ALD researchers, users and proponents. Our skilled ALD scientists will bring the breadth and depth of experience to solve your toughest thin film challenges.


Veeco ALD in Action – Customer Testimonials

At Veeco-CNT our customers’ feedback is important to us. The following quotes are typical of some of the responses we get from the tool owners in response to our direct support line at [ALDsupport AT veeco DOT com].

Product and Process Support


At Veeco, we do not just build coating equipment. We are also ALD researchers, users and proponents. Our skilled team of ALD scientists is here to work with you to solve your thin film challenges.

Contact us to learn more.


Veeco Completes Acquisition of Ultratech

One Company Now with Proven MOCVD, ALD, MBE, Lithography, Wet Etch & Clean, Laser Annealing & Melt, Ion Bean Deposition & Etch…

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