ALD Systems

Veeco-CNT offers a full suite of ALD systems for research and production applications. The affordable and reliable Savannah is a research workhorse. Fiji offers advanced experimentation capabilities such as plasma-enhanced ALD. Phoenix systems offer production ALD capacity.

Savannah ALD System
Fiji ALD System
Phoenix ALD System
Compare these ALD systems

Driving ALD Research

Veeco-CNT is the leading ALD supplier to academic institutions and industrial customers worldwide, with more than 530 ALD systems shipped for R&D and production. Our Savannah thermal and Fiji Plasma ALD systems are the ALD platforms of choice for R&D and have been cited in more than 2,000 peer-reviewed academic papers. They define the standards of ALD excellence for R&D.

Our fully automated industrial solutions for high-volume manufacturing (HVM) ALD combine lowest cost-of-ownership, superior throughput, and the highest standards of quality. HVM platforms are tailored to meet specific customer needs in terms of ALD process performance, wafer handling and throughput as well thermal management.

When you choose our equipment, you are backed by Veeco-CNT's passionate team of world-leading ALD researchers, users and proponents. Our skilled ALD scientists will bring the breadth and depth of experience to solve your toughest thin film challenges.

What our customers are saying

At Veeco-CNT our customers’ feedback is important to us. The following quotes are typical of some of the responses we get from the tool owners in response to our direct support line at [ALDsupport AT veeco DOT com].

ALD Expertise

 Product and Process Support

At Veeco-CNT, we do not just build coating equipment. We're also ALD researchers, users and proponents. Our skilled team of ALD scientists is here to work with you to solve your thin film challenges.